红外探测器工艺用器皿清洗方法研究

红外探测器材料一般为窄带系材料，在其制备工艺过程中，杂质离子更容易导致缺陷能级或表面快态复合中心，需选取较优的器皿清洗方法，对工艺用器皿所含金属离子进行评测控制。本文通过电感耦合等离子体质谱仪对比碲镉汞红外探测器工艺线上不同的器皿及清洗方法，对清洗后金属离子残留测试分析，获得较佳的器皿清洗方法，更好地保证红外探测器制备后性能。

Research of utensils cleaning for infrared detector process

Many utensils are often used in infrared detector process, but metallic ions in utensils have great effect on the performance of infrared detector, so the superior utensil cleaning methods are selected to remove metallic ions in utensils. The residual metallic ions in utensils with different cleaning methods were measured and analyzed by ICP-MS, and the optimal cleaning method was obtained. This cleaning method is suitable for the different preparation technologies of infrared detector.