A contribution towards model-based design of application-specific MEMS |
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| Affiliation: | 1. Bogazici University, Department of Electrical and Electronics Engineering, Turkey;2. Istanbul Technical University, Department of Electrical and Electronics Engineering, Turkey;1. Electrical and Computer Engineering Department, University of Illinois at Urbana-Champaign, Urbana, IL, United States;2. Intel Corporation, Hillsboro, OR, United States |
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| Abstract: | The design process of heterogeneous systems containing electro-mechanical components and electronic circuits involves expert knowledge, methods, and tools from different engineering domains. Cost-efficient research and development of such heterogeneous systems requires a systematic design flow without gaps. A contribution towards this global goal is presented in this article. A development and synthesis tool for one-dimensional accelerometer MEMS has been implemented, calculating sensor solutions and generating the models and layouts required for a hierarchical design flow in an automatic, module-based approach. Utilizing this flow, different accelerometers have been designed, manufactured, and characterized. A dedicated readout ASIC was developed to validate their dynamic behaviour. |
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| Keywords: | Model-based MEMS design Readout ASIC Synthesis of 1D accelerometer Measurements |
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