| Optical Constants and Structure of ZnO Films by Radio Frequency Magnetron Sputtering |
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| 作者姓名： | HUANG Bo LI Jing WU Yue-bo GUO Dong-hui WU Sun-tao |
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| 作者单位： | [1]Physics Department Xiamen University, Xiamen 361005, CHN [2]Pen-Tung Sah Micro-Electro-Mechanical Systems Research Center, Xiamen University, Xiamen 361005, CHN [3]Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, CHN |
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| 基金项目： | 科技部资助项目，Science and Technology Project of Fujian Province of China，Science and Technology Novel Project of Xiamen University |
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| 摘 要： | ZnO films are deposited on glass slides by radio frequency（RF） magnetron sputtering under different powers. The polycrystal structures and surface morphologies of the film are investigated. The optical transmission spectra for the ZnO films are measured within the range from 300 nm to 800 nm. The optical constants and thickness of the films are determined using a nonlinear programming method suggested by Birgin et al. The band gap of the film increases with reducing the nano-size of the film grains. The packing density of the films can be improved by reducing the RF power.
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| 关 键 词： | 氧化锌薄膜 射频磁控管溅射 光学常数 结构 |
| 文章编号： | 1007-0206（2007）02-0093-04 |
| 收稿时间： | 2006-12-01 |
| 修稿时间： | 2007-01-18 |
Optical Constants and Structure of ZnO Films by Radio Frequency Magnetron Sputtering |
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| HUANG Bo LI Jing WU Yue-bo GUO Dong-hui WU Sun-tao.Optical Constants and Structure of ZnO Films by Radio Frequency Magnetron Sputtering[J].Semiconductor Photonics and Technology,2007,13(2):93-96. |
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| Authors: | HUANG Bo LI Jing WU Yue-bo GUO Dong-hui WU Sun-tao |
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| Abstract: | ZnO films are deposited on glass slides by radio frequency(RF) magnetron sputtering under different powers.The polycrystal structures and surface morphologies of the film are investigated.The optical transmission spectra for the ZnO films are measured within the range from 300 nm to 800 nm.The optical constants and thickness of the films are determined using a nonlinear programming method suggested by Birgin et al.The band gap of the film increases with reducing the nano-size of the film grains.The packing density of the films can be improved by reducing the RF power. |
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| Keywords: | ZnO thin films scanning electron microscopy optical materials nonlinear programming |
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