| Determination of Optical Constant and Thickness for Thin Film by Using Improved FTM |
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| 作者姓名： | CHEN Qian XIE Yi CHEN Gong-jing ZHANG Wei |
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| 作者单位： | [1]Department of Opto-electronic Information, University of Electronic Science and Technology of China, Chengdu 610054, CHN [2]Department of Transmission Design and Development,Headquarter of ZTE Corporation, Shenzhen 518004, CHN |
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| 摘 要： | A new method to determine the optical constant and thickness of thin films is proposed. Based on the Fresnel＇s optical expression, the improved flexible tolerance method（FTM） is employed in the case of a digital model of thin film to fit the curve of measured reflectance spectrum. The simulation results show a satisfactory correlation of the optical constant with the thickness of the target film. By taking the influence of nonlinear condition into account as well as more direct and indirect limitation, the precision and value-searching efficiency have been improved. Furthermore, the problem of dimension degradation, which exists in “Downhill Simplex”, has been successfully avoided. No initial input is needed for the procedure of optimization to achieve optical solution, which makes the whole processing of value calculation much more convenient and efficient.
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| 关 键 词： | 薄膜 光学常量 厚度 FTM 评估函数 反射光谱 |
| 文章编号： | 1007-0206（2006）03-0158-05 |
| 收稿时间： | 2006-04-04 |
| 修稿时间： | 2006-04-20 |
Determination of Optical Constant and Thickness for Thin Film by Using Improved FTM |
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| CHEN Qian XIE Yi CHEN Gong-jing ZHANG Wei.Determination of Optical Constant and Thickness for Thin Film by Using Improved FTM[J].Semiconductor Photonics and Technology,2006,12(3):158-162,172. |
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| Authors: | CHEN Qian XIE Yi CHEN Gong-jing ZHANG Wei |
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| Abstract: | A new method to determine the optical constant and thickness of thin films is proposed. Based on the Fresnel's optical expression,the improved flexible tolerance method(FTM) is employed in the case of a digital model of thin film to fit the curve of measured reflectance spectrum. The simulation results show a satisfactory correlation of the optical constant with the thickness of the target film. By taking the influence of nonlinear condition into account as well as more direct and indirect limitation,the precision and value-searching efficiency have been improved. Furthermore,the problem of dimension degradation,which exists in "Downhill Simplex",has been successfully avoided. No initial input is needed for the procedure of optimization to achieve optical solution,which makes the whole processing of value calculation much more convenient and efficient. |
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| Keywords: | Thin film Optical constant Flexible tolerance method Evaluation function |
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