大口径反射镜子孔径拼接自检验精度分析 |
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引用本文: | 闫力松,王孝坤,郑立功,王润强,张学军.大口径反射镜子孔径拼接自检验精度分析[J].红外与激光工程,2014,43(6):1920-1924. |
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作者姓名: | 闫力松 王孝坤 郑立功 王润强 张学军 |
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作者单位: | 1.中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春 130033; |
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基金项目: | 国家自然科学基金(61036015);国家高技术研究发展计划(O8663NJ090) |
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摘 要: | 为了解决大口径反射镜子孔径拼接精度评价的问题,提出了自检验的子孔径拼接精度分析方法,实现了对大口径反射镜拼接精度的分析评价,同时提供了一种拼接精度检测方法。自检验即利用子孔径检测面形对拼接获得的拼接结果进行拼接精度检验。讨论了相应的精度评价指标及计算方法,并结合工程实例,利用600 mm 干涉仪实现了对800 mm 平面镜的拼接测量。以自检验的评价方式对拼接精度进行了分析,结果表明,拼接结果是准确的,同时验证了以自检验方式评价拼接精度的可靠性与准确性。
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关 键 词: | 光学检测 精度分析 大口径反射镜 子孔径拼接 自检验 |
收稿时间: | 2013-10-05 |
Large-diameter mirror stitching accuracy analysis based on self-test |
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Affiliation: | 1.Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.University of Chinese Academy of Sciences,Beijing 100049,China;3.Changchun UP Optotech Co.Ltd,Changchun 130033,China |
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Abstract: | In order to solve the problem evaluating the stitching accuracy of large-diameter reflecting mirror, a kind of stitching accuracy evaluating method called self-test was proposed in the article, realizing the analysis and evaluation to the stitching accuracy of large-diameter reflector mirror, while providing a method measuring the stitching precision. Self-test was a kind of method testing the accuracy of stitching result with sub-aperture measuring result. In the article, relative accuracy evaluation indexes and their calculation methods were discussed. As a project example, 800 mm plane mirror was splicing measured with a 600 mm interferometer and stitching accuracy was evaluated with the self-test method. It shows that the stitching is accurate and it's reliable and precise to assess stitching accuracy by the way of self-test at the same time. |
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