| 周期可变光栅的研制及应用 |
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| 引用本文： | 陈水良,李以贵.周期可变光栅的研制及应用[J].微细加工技术,2005(1):26-28. |
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| 作者姓名： | 陈水良 李以贵 |
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| 作者单位： | 上海交通大学,微纳米科学技术研究院,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 摘 要： | 设计制作了一种用形状记忆合金驱动的周期可变光栅。用硅微细加工技术制作一种类似弹簧结构的光栅，将光栅与形状记忆合金相连。通上电流，合金温度改变引起形变，因此可以拉伸光栅，并改变光栅周期。对合金的形变特性及光栅的衍射特性都作了测试。实验表明，光栅最大可被拉伸10％，衍射角变化为0．32mrad。
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| 关 键 词： | 微光机电系统 周期可变光栅 形状记忆合金 |
| 文章编号： | 1003-8213(2005)01-0026-03 |
| 修稿时间： | 2004年8月4日 |
Research and Application of Period-variable Grating |
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| CHEN Shui-liang,LI Yi-gui.Research and Application of Period-variable Grating[J].Microfabrication Technology,2005(1):26-28. |
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| Authors: | CHEN Shui-liang LI Yi-gui |
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| Abstract: | A period-variable grating actuated by a shape memory alloy (SMA) is designed and fabricated. A spring-like grating is made by Si microfabrication technology. The grating is connected with SMA which will change its shape when current is applied, so it can drag the grating and change the grating's period. The diffraction experiment of the grating indicates that 10% extension has been obtained, which will generate the change of diffraction angle of 0.32 mrad. |
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| Keywords: | MOEMS period-variable grating SMA |
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