| 提高实时调焦伺服系统性能的一种新方法 |
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| 引用本文： | 熊木地,肖文礼,邢忠宝.提高实时调焦伺服系统性能的一种新方法[J].微细加工技术,2001(2):1-5. |
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| 作者姓名： | 熊木地 肖文礼 邢忠宝 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所, |
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| 摘 要： | 对二元光学元件激光直写设备实时调焦伺服系统的要求与实现方法进行了较为全面的介绍，并分析了影响调焦伺服系统性能的主要因素，提出了采用BP神经网络对离焦信号进行线性化处理，同时采用压电陶瓷作为执行元件，并进行动态非线性补偿，可大大提高调焦伺服系统的精度与带宽，同时，在线估算离焦信号的带宽，以此调节刻划的速度，可大大提高刻划的效率。
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| 关 键 词： | 实时调焦 伺服系统 激光直写设备 二元光学元件 |
| 文章编号： | 1003-8213(2001)02-0001-06 |
| 修稿时间： | 2000年3月22日 |
A New Method for Improving Performance of Real-time Focusing Servo System |
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| Xiong Mudi,Xiao Wenli,Xing Zhong bao.A New Method for Improving Performance of Real-time Focusing Servo System[J].Microfabrication Technology,2001(2):1-5. |
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| Authors: | Xiong Mudi Xiao Wenli Xing Zhong bao |
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| Abstract: | The requirements and realization for real-time focusing servo system of the laser direct writing equipment used to manufacture binary optic element(BOE) are introduced.The key factors which effect the performance of the focusing servo system are analyzed.BP neural network technology is used to rectify the nonlinear characteristic of defocusing signal.Piezoceramics is used as operating element and it's nonlinearity is compensated dynamically.Thus,the precision and bandwidth of the servo system are largely improved.In the meantime in-line estimating the bandwidth of defocusing signal and accordingly adjusting the writing rate can increase the writing efficiency. |
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| Keywords: | Real-time focusing BP neural network Linearization Dynamiccompensation for nonlinearity Bandwidth estimation |
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