| PZT薄膜电滞回线测试的数值补偿研究 |
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| 引用本文： | 许晓慧,褚家如,朱龙洋,吴亚雷.PZT薄膜电滞回线测试的数值补偿研究[J].微细加工技术,2006(1):27-31. |
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| 作者姓名： | 许晓慧 褚家如 朱龙洋 吴亚雷 |
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| 作者单位： | 中国科学技术大学,精密机械与精密仪器系,合肥,230027 |
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| 基金项目： | 高等学校博士学科点专项科研项目;教育部优秀青年教师资助计划 |
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| 摘 要： | 通过Sawyer-Tower测试电路研究了铁电薄膜的电滞回线,发现薄膜漏电阻以及示波器输入电阻和电容的影响可能会使所测量的电滞回线发生形状扭曲或者使测量结果出现较大偏差,通过数值补偿方法重建了电荷平衡方程,并编制了相应的软件补偿程序。通过对溶胶-凝胶制备的PZT铁电薄膜的电滞回线测试表明,运用该数值补偿方法可以有效补偿薄膜漏电阻以及示波器输入电阻和电容对测试结果的影响,满足PZT铁电薄膜制备技术以及微机电系统中器件设计对薄膜性能测试的要求。
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| 关 键 词： | 电滞回线 极化 数值补偿 |
| 文章编号： | 1003-8213(2006)01-0027-05 |
| 修稿时间： | 2005年6月30日 |
Numerical Compensation of Hysteresis Measurement on PZT Thin Film |
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| XU Xiao-hui,CHU Jia-ru,ZHU Long-yang,WU Ya-lei.Numerical Compensation of Hysteresis Measurement on PZT Thin Film[J].Microfabrication Technology,2006(1):27-31. |
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| Authors: | XU Xiao-hui CHU Jia-ru ZHU Long-yang WU Ya-lei |
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| Abstract: | Sawyer-Tower test circuit was used to measure the hysteresis loop of ferroelectric PZT thin film.The influence of leakage currents in the film and parasitic effect of the oscilloscope may contribute to strongly affect hysteresis measurement,making impossible the correct determination of the remanent and spontaneous polarization(P_r and P_s) and of the coercive field(E_c).Considering the influence of leakage currents and parasitic effect the charge equilibrium equation was reconstructed,and a numerical procedure was then presented allowing to restore the true shape of the ferroelectric polarization.The merit of this method was demonstrated through a successful application to a ferroelectric PZT thin film. |
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| Keywords: | PZT |
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