| 准分子激光的应用 |
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| 引用本文： | 冯伯儒.准分子激光的应用[J].微细加工技术,1994(3):43-51. |
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| 作者姓名： | 冯伯儒 |
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| 作者单位： | 中国科学院光电技术研究所 |
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| 摘 要： | 本文介绍了准分子激光器的基本类型、主要应用领域及其与材料相互作用的机理。对准分子激光在电子工业、生物医学和材料加工方面的一些重要应用做了比较详细的论述。
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| 关 键 词： | 准分子激光器 材料加工 激光应用 |
APPLICATIONS OF EXCIMER LASERS |
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| Feng Boru.APPLICATIONS OF EXCIMER LASERS[J].Microfabrication Technology,1994(3):43-51. |
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| Authors: | Feng Boru |
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| Abstract: | The main types of e xcimer laser,its basic application area and the inte-raction mechanism of excimer laser with the diffeient matorials are introducd.Some of the principal application of excimer laser in electronics industiy,biology and medical science,and maierial processing are discussed in detail. |
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| Keywords: | excimer laser material processing laser applications |
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