| 光谱响应在线测试仪的研制与应用 |
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| 引用本文： | 牛军,乔建良,常本康.光谱响应在线测试仪的研制与应用[J].半导体技术,2008,33(3):212-215. |
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| 作者姓名： | 牛军 乔建良 常本康 |
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| 作者单位： | 南京理工大学,电子工程与光电技术学院,南京,210094;南阳理工学院电子与电气工程系,河南,南阳,473004;南京理工大学,电子工程与光电技术学院,南京,210094 |
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| 基金项目： | 高等学校博士学科点专项科研项目 |
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| 摘 要： | 基于光电阴极光谱响应测试原理,研制了光谱响应在线测试仪,经多次实验验证,准确度达到1 nA,完全能够检测出NEA激活过程中产生的微弱光电信号,且具有良好的重复性.利用该光谱响应测试仪,成功实现了激活台内负电子亲和势(NEA)光电阴极激活过程中的光谱响应在线测试,获得了光谱响应曲线,并将其转换成阴极的量子产额曲线.通过曲线拟合方法计算出反映阴极性能的重要参数,得到了大量的阴极信息,弥补了依靠光电流监控阴极信息的不足.
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| 关 键 词： | 光电阴极 激活 光谱响应 在线测试 |
| 文章编号： | 1003-353X（2008）03-0212-04 |
| 收稿时间： | 2007-08-30 |
| 修稿时间： | 2007年8月30日 |
Development and Application of Spectral Response On-Line Tester |
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| Niu Jun,Qiao Jianliang,Chang Benkang.Development and Application of Spectral Response On-Line Tester[J].Semiconductor Technology,2008,33(3):212-215. |
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| Authors: | Niu Jun Qiao Jianliang Chang Benkang |
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| Affiliation: | Niu Jun1,2,Qiao Jianliang1,Chang Benkang1(1.Institute of Electronic Engineering & Optoelectronic Technology,Nanjing University of Science & Technology,Nanjing 210094,China,2.Department of Electron & Electric Engineering,Nanyang Institute of Technology,Nanyang 473004,China) |
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| Abstract: | A on-line spectral response tester was developed independently based on the photo-cathode spectral response principle of testing, experiments prove that the electric current measure accuracy reaches 1 hA, it can measure out the faint photoelectric signal produced in the course of NEA activation, and has good repetitiveness. The performance of NEA photo-cathodes in activation was measured with the tester, the spectral response curve was obtained, and it was changed into quantum yield curve of the photo-cathodes, important parameters of photo-cathodes performance were calculated out by curve fitting method, large number of photo-cathodes information were received. It remedies the deficiency of relying on the photoeurrent to control photo-cathode information. |
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| Keywords: | photo-cathode activate spectral response on-line test |
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