| SPC在半导体晶圆制造厂的应用(上) |
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| 引用本文： | 梁德丰,钱省三,梁静.SPC在半导体晶圆制造厂的应用(上)[J].半导体技术,2004,29(3):58-60,70. |
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| 作者姓名： | 梁德丰 钱省三 梁静 |
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| 作者单位： | 上海理工大学工业工程研究所/微电子发展中心,上海,200093;上海理工大学工业工程研究所/微电子发展中心,上海,200093;上海理工大学工业工程研究所/微电子发展中心,上海,200093 |
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| 摘 要： | 由于半导体制造工艺过程的复杂性,一般很难建立其制造模型,不能对工艺过程状态有效地监控,所以迫切需要先进的半导体过程控制技术来严格监控工艺过程状态,而SPC就是其中最重要的一种技术.本文针对SPC做了简要概述,着重论述了根据半导体生产工艺的特点来实现其在半导体晶圆厂的实际应用.
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| 关 键 词： | 半导体 SPC 过程控制 控制图 |
| 文章编号： | 1003-353X(2004)03-0058-03 |
Application of SPC in semiconductor wafer manufactory |
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| LIANG De-feng QIAN Xing-san LIANG Jing.Application of SPC in semiconductor wafer manufactory[J].Semiconductor Technology,2004,29(3):58-60,70. |
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| Authors: | LIANG De-feng QIAN Xing-san LIANG Jing |
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| Abstract: | Due to the complexity of process of semiconductor manufacture, it is hardly tobuilds up the model of process for the manufactory to control the process effectively. So we needurgently control the process strictly by APC(Advanced Process Control)among which SPC is themost important. The paper describes briefly SPC technology and introduces mainly its application insemiconductor wafer manufactory. |
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| Keywords: | Semiconductor SPC Process Control Statistical Graph |
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