| 螺杆泵胶液分配高度对胶滴大小一致性的影响 |
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| 引用本文： | 邓圭玲,彭全凡.螺杆泵胶液分配高度对胶滴大小一致性的影响[J].半导体技术,2005,30(5):44-48. |
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| 作者姓名： | 邓圭玲 彭全凡 |
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| 作者单位： | 中南大学机电工程学院,长沙,410083;中南大学机电工程学院,长沙,410083 |
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| 摘 要： | 胶液分配高度直接影响接触式胶液分配系统胶液从针头向基板的转移过程.本文实验研究了胶液分配高度对胶滴尺寸及其一致性的影响规律.实验表明,如果其他胶液分配条件固定不变,对应不同的胶液分配高度,胶液分配所形成的胶滴尺寸及其分布不同;给定其他胶液分配条件,存在对应的胶液分配高度极限与之匹配以获得一致性优良的胶滴.
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| 关 键 词： | 胶液分配 胶液分配高度 胶滴尺寸 胶滴一致性 |
| 文章编号： | 1003-353X(2005)05-0044-05 |
| 修稿时间： | 2004年11月9日 |
Influences of Dispensing Height on Dots Size Consistency in Auger Pump Dispensing |
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| DENG Gui-ling,PENG Quan-fan.Influences of Dispensing Height on Dots Size Consistency in Auger Pump Dispensing[J].Semiconductor Technology,2005,30(5):44-48. |
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| Authors: | DENG Gui-ling PENG Quan-fan |
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| Abstract: | The dispensing height has direct influence on the process of fluid transferring fromneedle tip to substrate. The influence of dispensing height on dispensing dots size consistency isresearched. The experimental results show that the dots size distribution is different if the dispensingconditions are fixed. Under certain dispensing conditions, it exists corresponding limits of dispens-ing height matching with it to obtain good dispensing dots consistency. |
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| Keywords: | dispensing dispensing height dispensing dot size dots consistency |
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