首页 | 官方网站   微博 | 高级检索  
     

准分子激光扫描淀积PZT/YBCO结构铁电薄膜
引用本文:赵建洪,刘建设,黄歆,李兴教,安承武,陆冬生,李再光.准分子激光扫描淀积PZT/YBCO结构铁电薄膜[J].中国激光,1997,24(4):319-322.
作者姓名:赵建洪  刘建设  黄歆  李兴教  安承武  陆冬生  李再光
作者单位:华中理工大学固体电子学系,华中理工大学激光技术国家实验室
基金项目:国家自然科学基金,激光技术国家实验室开放基金
摘    要:利用脉冲准分子激光(工作气体XeCl,波长308nm,脉宽28ns)在外延YBCO/LaAlO3(100)单晶基片上淀积了Pb(Zr0.55Ti0.45)O3铁电薄膜,YBCO薄膜既为生长高取向PZT薄膜提供了晶体匹配条件,同时也为PZT铁电薄膜提供了下电极。讨论了工艺参数对晶相结构和表面形貌的影响。用X射线衍射表征了该多层膜的晶相结构,扫描电镜观察其表面形貌。PZT铁电薄膜的剩余极化为21μC/cm2,矫顽场为65kV/cm。

关 键 词:PZT/YBCO/LaAlO3,激光原位淀积,铁电薄膜
收稿时间:1996/4/1

Preparation of Pb(Zr 0.55 Ti 0.45 )O 3 Thin Films on YBCO/LaAlO 3 Using Excimer Laser
Zhao Jianhong,Liu Jianshe,Huang Xin,Li Xingjiao.Preparation of Pb(Zr 0.55 Ti 0.45 )O 3 Thin Films on YBCO/LaAlO 3 Using Excimer Laser[J].Chinese Journal of Lasers,1997,24(4):319-322.
Authors:Zhao Jianhong  Liu Jianshe  Huang Xin  Li Xingjiao
Abstract:Highly oriented Pb(Zr 0.55 Ti 0.45 )O 3(PZT) ferroelectric thin films have been grown on an epitaxial YBCO/LaAlO 3(100) single crystal substrate using pulsed laser deposition (XeCl excimer, λ=308 nm,τ=28 ns). The YBCO layer provides a seed for PZT growth and can also act as an electrode for the PZT thin films. These heterostructures were characterized using X ray diffraction, and the surface morphologies were observed using SEM. The PZT thin film showed a remnant polarization of 21 μC/cm2 and a coercive field of 65 kV/cm. The effects of processing parameters on structures and surface morphoiogies are discussed.
Keywords:PZT/YBCO/LaAlO3  PLD in situ  ferroelectric thin film
本文献已被 CNKI 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司    京ICP备09084417号-23

京公网安备 11010802026262号