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| 铜离子交换单步掩埋BK7玻璃波导的制备与表征 | |
| 引用本文： | 王鹏飞,郑杰,鄂书林,G.C.Righini.铜离子交换单步掩埋BK7玻璃波导的制备与表征[J].中国激光,2004,31(10):252-1256. |
| 作者姓名： | 王鹏飞 郑杰 鄂书林 G.C.Righini |
| 作者单位： | 1. 中国科学院长春光学精密机械及物理研究所应用光学国家重点实验室,吉林,长春,130031 2. 吉林大学电子科学与工程学院集成光电子国家重点实验室,吉林,长春,130023 3. IFAC-CNR,Via Panciatichi 64,Firenze,Italy |
| 基金项目： | 中国科学院“百人计划”——“光通信器件研究”项目，国家自然科学基金(批准号:69977020)资助项目。 |
| 摘 要： | 利用Cu离子交换技术制备了BK7玻璃平面光波导,在6328nm波长下,用棱镜耦合技术测量出所制备波导的有效折射率,利用反WKB方法计算并确定了平面光波导的折射率分布,通过对折射率分布进行函数拟合,发现离子交换后的样品折射率分布近似符合改进后的高斯分布,样品的折射率分布似乎是一个掩埋波导的折射率分布,求出所制备玻璃平面光波导在570℃的扩散系数De≈12133×10-14m2s。同时,对所制备波导进行了电子显微镜(EMS)和次级离子质谱(SIMS)测试,得到了铜离子在玻璃表面的浓度分布,从而证明了实验所得到的BK7玻璃平面光波导是掩埋波导。这种掩埋平面波导是由单步Cu离子交换技术得到的。 |
| 关 键 词： | 集成光学 Cu离子交换 单步掩埋光波导 BK7玻璃 |
| 收稿时间： | 2003/12/19 |
Characterization of Single Step Buried Waveguides on BK7 Glass by Copper Ion Exchange |
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| WANG Peng fei ,ZHENG Jie ,E Shu lin ,G. C. Righini State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,The Chinese Academy of Sciences,Changchun,Jilin ,China State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun,Jilin ,China IFAC CNR,Via Panciatichi ,Firenze,Italy.Characterization of Single Step Buried Waveguides on BK7 Glass by Copper Ion Exchange[J].Chinese Journal of Lasers,2004,31(10):252-1256. | |
| Authors: | WANG Peng fei ZHENG Jie E Shu lin G C Righini State Key Laboratory of Applied Optics Changchun Institute of Optics Fine Mechanics and Physics The Chinese Academy of Sciences Changchun Jilin China State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University Changchun Jilin China IFAC CNR Via Panciatichi Firenze Italy |
| Affiliation: | WANG Peng fei 1,ZHENG Jie 2,E Shu lin 1,G. C. Righini 3 1State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,The Chinese Academy of Sciences,Changchun,Jilin 130031,China 2State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun,Jilin 130022,China 3IFAC CNR,Via Panciatichi 64,Firenze,Italy |
| Abstract: | Planar optical waveguides were fabricated by copper ion-exchange on BK7 glass substrate. The effective refractive index was measured by prism-coupling technique at the wavelength of 632.8 nm. Refractive index profile was determined by Inverse-WKB method. The results showed that the best fitting to the index profile was improved Gauss function, and the index profile appeared to be a buried waveguide′s index profile. The diffused coefficient of copper ion-exchange at 570℃ was obtained as De≈1.2133×10-14 m2/s. At the same time, the BK7 ion-exchanged glass samples were determined by electron microscope scan (EMS) and secondary ion mass spectroscopy (SIMS) measurements, the copper ions concentration in the BK7 glass waveguides′ surface was gotten. It could be shown that the BK7 glass planar waveguides were buried waveguides. The fabricated BK7 buried glass was obtained by single step copper ion exechange. |
| Keywords: | integrated optics copper ion exchange single step buried waveguieds BK7 glass |
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