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能动磨盘加工与数控加工特性分析
引用本文:范斌,万勇建,陈伟,杨力,曾志革,伍凡,吴时彬.能动磨盘加工与数控加工特性分析[J].中国激光,2006,33(1):28-132.
作者姓名:范斌  万勇建  陈伟  杨力  曾志革  伍凡  吴时彬
作者单位:中国科学院光电技术研究所,四川,成都,610209
摘    要:能动磨盘加工(CCAL)与数控加工(CCOS)是大型非球面主镜加工有别于经典加工的两种新型加工工艺,针对这两种主镜加工工具,建立了各自的加工去除函数模型,从理论上分析了两者的加工特性,并在直径1300 mm非球面主镜加工实验的基础上,根据主镜面形ZYGO干涉仪和哈特曼-夏克(Hartmann-Shack)传感仪的检测数据,利用功率谱密度(PSD)和相位梯度进一步探讨了这两种加工工艺对主镜面形中高频差的影响,提出了将能动磨盘加工与数控加工相结合的主镜加工工艺方法。

关 键 词:光学设计  能动磨盘  能动磨盘加工  数控加工  功率谱密度
文章编号:0258-7025(2006)01-0128-05
收稿时间:2005-02-28
修稿时间:2005-09-05

Manufacturing Features Comparing between Computer Control Active-Lap and Computer Control Optical Surface for Large Aspheric Optics
FAN Bin,WAN Yong-jian,CHEN Wei,YANG Li,ZENG Zhi-ge,WU Fan,WU Shi-bin.Manufacturing Features Comparing between Computer Control Active-Lap and Computer Control Optical Surface for Large Aspheric Optics[J].Chinese Journal of Lasers,2006,33(1):28-132.
Authors:FAN Bin  WAN Yong-jian  CHEN Wei  YANG Li  ZENG Zhi-ge  WU Fan  WU Shi-bin
Affiliation:Institute of Optics and Electronics, The Chinese Academy of Science, Chengdu, Sichuan 610209, China
Abstract:Computer control active-lap(CCAL) and computer control optical surface(CCOS) are two new manufacturing technologies which are different from the classical manufacturing technology for large aspheric mirrors manufacturing,the manufacturing removal function models are found respectively aimed at these two manufacturing tools,and the manufacturing features are analyzed from the viewpoint of theory.CCOS possesses the ability of partly grind and polish,but tends to generate mid-and high-spatial frequencies error; CCAL can control the mid-and high-spatial frequencies error effectively,but has nothing for aperture grind and polish.The mid-and high-spatial frequencies error generated by these two manufacturing technologies are further discussed by the methods of power spectral density(PSD) and phase gradient based on the mirror testing data from ZYGO interferometer and Hartmann-Shack wavefront sensor during the experiment of diameter of 1300 mm aspheric mirror manufacture.A new manufacturing technology for large aspheric mirrors combining the technologies of the CCAL and CCOS is proposed.
Keywords:optical design  active-lap  computer control active-lap  computer control optical surface  power spectral density
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