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圆对称衍射光学束匀滑器件的精细化设计
引用本文:王金玉,谭峭峰,严瑛白,金国藩.圆对称衍射光学束匀滑器件的精细化设计[J].中国激光,2003,30(3):206-210.
作者姓名:王金玉  谭峭峰  严瑛白  金国藩
作者单位:清华大学精密测试技术与仪器国家重点实验室,北京,100084
基金项目:国家高技术项目 (86 3 80 4 ),国家重点基础研究项目 (973 G1 9990 330 ),中国博士后科学基金资助项目
摘    要:利用爬山 模拟退火混合优化算法 ,对圆对称衍射光学束匀滑器件进行了精细化设计。对比选取不同的焦面采样间隔进行的束匀滑器件的设计结果 ,发现其采样间隔严重影响设计结果的真实性 ,设计计算中仅仅满足采样定理是不够的。为了获得真实的束匀滑分布 ,采样间隔必须小于 /等于 0 5倍传统采样间隔 ,只有这样才能同时控制住焦面采样点和其他非采样点处的光强分布 ,使其满足束匀滑分布

关 键 词:物理光学  衍射光学器件  混合优化算法  束匀滑  精细化设计
收稿时间:2001/12/10

Precise Design of Circular-symmetrical Diffractive Optical Element for Beam Smoothing
WANG Jing yu,TAN Qiao feng,YAN Ying bai,JIN Guo fan.Precise Design of Circular-symmetrical Diffractive Optical Element for Beam Smoothing[J].Chinese Journal of Lasers,2003,30(3):206-210.
Authors:WANG Jing yu  TAN Qiao feng  YAN Ying bai  JIN Guo fan
Abstract:In this paper, by using the hybrid algorithm merging hill climbing with simulated annealing, the precise design of the circular symmetrical diffractive optical element (DOE) for beam smoothing is completed. By comparing between the designed results of different sampling interval on focal plane, it is found that the facticity of designed result is greatly influenced by the sampling intervals. During the designing process, it is insufficient to sample only according to the sampling theory. To get the faithful intensity distribution for beam smoothing, the sampling interval must be less than or equal to 1/2 of the traditional sampling interval. Only under this condition, both the intensity of samples and other points on focal plane can be controlled to meet the requirements of beam smoothing.
Keywords:physical optics  diffractive optical element  hybrid algorithm  beam smoothing  precise design
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