| 质子交换铌酸锂波导的退火工艺 |
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| 引用本文： | 罗辉,戴基智,杨亚培,包洪涛,赵天卓,佟会.质子交换铌酸锂波导的退火工艺[J].光电子技术与信息,2006,19(2):17-21. |
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| 作者姓名： | 罗辉 戴基智 杨亚培 包洪涛 赵天卓 佟会 |
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| 作者单位： | 电子科技大学光电信息学院,四川,成都,610054 |
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| 摘 要： | 介绍了质子交换铌酸锂波导的制作工艺，比较分析了不同切向、不同退火温度、不同退火时间下铌酸锂波导的特性．
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| 关 键 词： | 光波导 退火质子交换 铌酸锂光波导 |
| 文章编号： | 1006-1231(2006)02-0017-05 |
| 收稿时间： | 2005-06-16 |
| 修稿时间： | 2005-12-14 |
Annealed Technology of Proton Exchange LiNbO3 Waveguide |
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| LUO Hui,DAI Ji-zhi,YANG Ya-pei,BAO Hong-tao,ZHAO Tian-zhuo,TONG Hui.Annealed Technology of Proton Exchange LiNbO3 Waveguide[J].Optoelectronic Technology & Information,2006,19(2):17-21. |
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| Authors: | LUO Hui DAI Ji-zhi YANG Ya-pei BAO Hong-tao ZHAO Tian-zhuo TONG Hui |
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| Affiliation: | School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China |
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| Abstract: | The technology of proton exchanged LiNbO3 waveguide was introduced and the characterizations of LiNbO3 waveguide with different cutting orientation, annealed temperature and annealed time were compared. |
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