| 氦质谱检漏试验方法分析 |
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| 引用本文： | 安琪,罗晓羽.氦质谱检漏试验方法分析[J].电子产品可靠性与环境试验,2014(4):34-38. |
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| 作者姓名： | 安琪 罗晓羽 |
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| 作者单位： | 工业和信息化部电子第四研究院,北京100176 |
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| 摘 要： | 从电子元器件气密性封装的原理入手,介绍了常用的检漏试验方法,阐述了美军标MIL-STD-883氦质谱检漏试验方法的最新发展,分析了积累氦质谱试验方法的特点及要求,并探讨了基于氦气交换时间常数τHe的氦质谱检漏思路。
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| 关 键 词： | 氦质谱 密封 标准 试验方法 |
Analysis of Leak Test with Helium Mass Spectrometer |
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| AN Qi,LUO Xiao-yu.Analysis of Leak Test with Helium Mass Spectrometer[J].Electronic Product Reliability and Environmental Testing,2014(4):34-38. |
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| Authors: | AN Qi LUO Xiao-yu |
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| Affiliation: | (China Electronics Standardization Institute, Beijing 100176, China) |
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| Abstract: | Based on the principle of hermetic packages of electronic components, the commonleak test methods are introduced. The recent development in the helium mass spectrometer leak testing method in MIL-STD-883 is analyzed. After that, the characteristics and requirements of the cumulative helium-mass test method are analyzed. And finally, the idea of the helium-mass detection based on the helium exchanging time constant（τHe） is discussed. |
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| Keywords: | helium-mass spectrum seal standard test method |
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