| 飞秒激光多脉冲烧蚀研究进展 |
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| 引用本文： | 季忠刚,邓蕴沛,冷雨欣,李儒新,徐至展.飞秒激光多脉冲烧蚀研究进展[J].激光与光电子学进展,2003,40(9):14-20. |
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| 作者姓名： | 季忠刚 邓蕴沛 冷雨欣 李儒新 徐至展 |
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| 作者单位： | 1. 华东师范大学物理系,上海,200062;中国科学院上海光学精密机械研究所,上海,201800
2. 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 由于飞秒脉冲在烧蚀固体材料时的独特机制，在材料激光微加工方面有其突出的优点，表现出极大的应用潜力。本文主要就国内外多脉冲飞秒烧蚀研究的进展作一简介，包括多脉冲烧蚀的特点，现有的烧蚀机制分析及其应用前景等。
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| 关 键 词： | 飞秒激光 多脉冲 飞秒脉冲 烧蚀 微加工 优点 固体材料 |
| 收稿时间： | 2003/1/13 |
Research Progress of Femtosecond Multi-pulses Laser Ablation |
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| JI Zhonggang DENG Yunpei LENG Yuxin LI Ruxin XU Zhizhan.Research Progress of Femtosecond Multi-pulses Laser Ablation[J].Laser & Optoelectronics Progress,2003,40(9):14-20. |
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| Authors: | JI Zhonggang DENG Yunpei LENG Yuxin LI Ruxin XU Zhizhan |
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| Abstract: | Because of the particular mechanism, there are many advantages in nu'cromacnining when using femtosecond pulses. For multiple pulses, there is some difference with single-shot pulses. In this article we will introduce the mechanism and the theoretical model of femtosecond multi -pulse laser ablation of materials, and explain the properties of multi -pulses laser -induced damage. Here the widespread application prospect is described too. |
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| Keywords: | micromachining femtosecond laser multiple pulses incubation (cumulation) effect |
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