| 飞秒激光诱导金属功能微结构的机理与应用 |
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| 引用本文： | 赵全忠,邱建荣,姜雄伟,赵崇军,朱从善.飞秒激光诱导金属功能微结构的机理与应用[J].激光与光电子学进展,2004,41(6):46-50. |
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| 作者姓名： | 赵全忠 邱建荣 姜雄伟 赵崇军 朱从善 |
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| 作者单位： | 中国科学院上海光学精密机械研究所光子技术实验室,上海,201800 |
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| 摘 要： | 介绍了飞秒激光与金属相互作用的机理以及飞秒激光在金属超加工方面的一些最新应用。基于一维双温扩散模型分析了飞秒激光与金属相互作用的超快机制；介绍了飞秒激光加工光电倍增管电极，修复光刻掩膜．诱导白炽灯丝阵列微孔等一些工业应用。
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| 关 键 词： | 飞秒激光 金属超加工 激光烧蚀 功能微结构 |
| 收稿时间： | 2004/11/21 |
Mechanism and Applications of Femtosecond Laser Induced Microstructures in Metals |
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| ZHAO Quanzhong,QIU Jianrong,JIANG Xiongwei,ZHAO Chongjun,ZHU Congshan.Mechanism and Applications of Femtosecond Laser Induced Microstructures in Metals[J].Laser & Optoelectronics Progress,2004,41(6):46-50. |
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| Authors: | ZHAO Quanzhong QIU Jianrong JIANG Xiongwei ZHAO Chongjun ZHU Congshan |
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| Abstract: | The mechanism and some state of the art applications of femtosecond laser induced metal microstructures are introduced. Based on the one-dimensional, two-temperature diffusion model, the ultrafast mechanism of femtosecond laser interaction with metals is analyzed. Some industrial applications including micromachining dynodes of photomultipliers, repairing photomask of lithography, fabricating array micro-holes in incandescent filaments, etc. are introduced. |
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| Keywords: | femtosecond laser functional microstructure laser microprocessing laser ablation metal |
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