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基于图像处理的光电传感器光路检测与调整方法研究
引用本文:郑焱,徐峰,褚渊.基于图像处理的光电传感器光路检测与调整方法研究[J].半导体光电,2005,26(5):458-460,463.
作者姓名:郑焱  徐峰  褚渊
作者单位:清华大学,精密测试技术及仪器国家重点实验室,北京,100084
摘    要:提出了一种基于图像处理的反射式强度调制型光电传感器光路调整方法.考虑了光源光阑等器件对光路的影响,利用面阵CMOS器件采集传感器出射光斑的图像,并通过图像处理的方法分别计算光斑的几何中心与能量中心,得到偏心误差值,以此为依据调整传感器光路,达到改善光斑光强分布的目的.文中对测量系统、调整方法、光斑参数计算等做了详细说明,并给出了调整前后的光斑图像.试验结果表明,这种方法的测量原理简单、测量精度高,可以有效地改善传感器的光强分布状况.

关 键 词:光强分布  光路调整  图像处理  图像处理  光电传感器  光路  检测  调整方法  研究  Image  Processing  Based  Sensor  Path  Optical  Method  Alignment  分布状况  光强分布  测量精度  测量原理  结果  试验  光斑图像
文章编号:1001-5868(2005)05-0458-03
收稿时间:2005-01-28
修稿时间:2005-01-28

Testing and Alignment Method for Optical Path of Sensor Based on Image Processing
ZHENG Yan,XU Feng,CHU Yuan.Testing and Alignment Method for Optical Path of Sensor Based on Image Processing[J].Semiconductor Optoelectronics,2005,26(5):458-460,463.
Authors:ZHENG Yan  XU Feng  CHU Yuan
Affiliation:State Key Lab. of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084 ,CHN
Abstract:A new method of optical axis alignment for RIM optical sensors based on image processing is presented.The effects of light source and diaphragm on optical path are considered.An area array CMOS device is used to get the spot image from the sensor.By uing image processing methods,the geometry and energy centers of the spot are calculated to get the offset value,so the sensor's optical components are adjusted and the asymmetry distribution of the light intensity can be reduced.The testing setup,the methods of image processing,and spot parameter calculation are described in detail.The spot images before and after the adjustment are also given.And experiment results show the validity of the proposed method.
Keywords:light intensity distribution  optical path alignment  image processing
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