| 微型加速计全差分Σ-Δ接口IC |
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| 引用本文： | 赵宇飞,李扬,于明.微型加速计全差分Σ-Δ接口IC[J].电子设计工程,2011,19(22):181-183. |
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| 作者姓名： | 赵宇飞 李扬 于明 |
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| 作者单位： | 1. 河北工业大学信息工程学院,天津,300400
2. 南开大学信息技术科学学院,天津,300071 |
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| 摘 要： | 主要描述一种加速度感应系统全差分Σ-ΔCMOS接口IC。电容传感器接口由一个前端可配置开关电容(SC)电荷放大器和一个末端,一阶SCΣ-Δ调制器组成。本设计采用开关双采样技术(CDS)来消减低频噪声,能有效地隔离高性能Σ-Δ调制器和MEMS传感器。采用0.35μm CMOS技术,在3.3 V电源环境下能够理想工作。仿真结果显示该设计能达到0.55 V/g的精度。
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| 关 键 词： | SC MEMS 加速计 Σ-Δ 电容传感器接口芯片 |
A fully-differential Sigma-delta interface IC for micro-accelerometer |
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| ZHAO Yu-fei,LI Yang,YU Ming.A fully-differential Sigma-delta interface IC for micro-accelerometer[J].Electronic Design Engineering,2011,19(22):181-183. |
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| Authors: | ZHAO Yu-fei LI Yang YU Ming |
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| Affiliation: | 1(1.College of Information Engineering,Hebei University of Technology,Tianjin 300400,China; 2.College of Information Technical Science,Nankai University,Tianjin 300071,China) |
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| Abstract: | Presents a fully-differential Sigma-delta CMOS interface IC for an acceleration sensing system.The Capacitive sensor interface is composed of a front-end programmable Switched Capacitor（SC） charge amplifier that converts the acceleration signal to voltage,and a back-end first-order SC Sigma-delta modulator.Two stages of correlated-double-sampling（CDS） scheme were used in the charge amplifier to cut down the low frequency noise.This architecture decouples the MEMS sensor from the optimized-performance Sigma-delta modulator.This work is designed and implemented in a 0.35μm CMOS technology with 3.3V supply voltage.Simulation results show sensitivity of 0.55V/g is achieved in the range of ＋1g. |
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| Keywords: | SC MEMS accelerometer Sigma-delta capacitance sensor interface circuit |
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