| 新一代IC-CAM系统的功能改进 |
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| 引用本文： | 朱小琳,向采兰.新一代IC-CAM系统的功能改进[J].微电子学,2002,32(4):253-256. |
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| 作者姓名： | 朱小琳 向采兰 |
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| 作者单位： | 清华大学,微电子学研究所,北京,100084 |
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| 基金项目： | “九五”国家重点攻关项目 (97- 76 0 - 0 1- 0 2 ) |
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| 摘 要： | 文章介绍了第二代集成电路计算机辅助制造(IC-CAM)系统。该系统在第一代IC-CAM系统基础上，全面改进了操作员予系统、调度员予系统和质检员予系统，实现了控制图的自动绘制和判剐，添加了流水周期控制模块；加强了设备管理予系统功能，形成了完整的设备运行记录，并具有提示定期维护的功能；新增了厂务管理予系统，实现了厂务环境数据的自动采集。使用该IC-CAM系统后，可有效地提高生产效率和产品质量。
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| 关 键 词： | 集成电路 计算机辅助制造 设备管理 流水周期 |
| 文章编号： | 1004-3365(2002)04-0253-04 |
| 修稿时间： | 2001年7月24日 |
Functional Improvements in the New Generation of IC-CAM System |
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| ZHU Xiao-lin,XIANG Cai lan.Functional Improvements in the New Generation of IC-CAM System[J].Microelectronics,2002,32(4):253-256. |
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| Authors: | ZHU Xiao-lin XIANG Cai lan |
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| Abstract: | The second generation of computer aided manufacturing system for integrated circuits is introduced in the paper On the basis of the first generation of IC CAM system, the operator, dispatcher and quality control subsystems are all improved Control charts can be plotted and judged automatically and a cycle time controlling module is added The operating record of every equipment is formed and the preventive maintenance reminder will be given on schedule, which enhances the function of the equipment management subsystem The new system also includes facility management subsystem, in which the environment parameters can be collected and presented The new IC CAM system will help to improve the manufacture efficiency and the quality of products |
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| Keywords: | Integrated circuit Computer aided manufacturing Equipment management Cycle time |
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