用改进的模拟退火算法设计二元光学阵列器件

为提高收敛速率，本文对模拟退火（SA）算法进行改进，并用此改进算法设计用于产生大扇出系数、任意形状分布光阵列的二元光学器件，其衍射效率设计值达85％以上，输出阵列不均匀性小于3％。

Design of BOE Using Improved Simulated Annealing Algorithm

To speed up convergence,simulated annealing algorithm have beenimproved to design binary optical element (BOE),which is applied for multiple beam splitting and its output pattern can design arbitrary.The calculated diffractive efficiency of BOE is more than 85 %,the nonuniformity of output array is less than 3 %.