| 基于正交解调算法的三维轮廓术的误差因素分析 |
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| 引用本文： | 苏挺,张永林.基于正交解调算法的三维轮廓术的误差因素分析[J].光电子．激光,2002,13(9):962-965. |
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| 作者姓名： | 苏挺 张永林 |
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| 作者单位： | 暨南大学物理系,广东,广州,510632 |
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| 摘 要： | 发现基于正交解调算法的三维（3－D）轮廓术存在的三种主要误差，激光干涉仪的激光散斑造成的误差；正交解调算法中混频频率所引入的误差，结构光中余弦条纹形变造成的误差，对3种误差进行了实验及理论分析，给出了最终的修正结果。
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| 关 键 词： | 三维（3－D）形貌测量 轮廓术 正交解调算法 误差分析 |
| 文章编号： | 1005-0086(2002)09-0962-04 |
| 修稿时间： | 2002年3月11日 |
Error Analysis of 3-D Profilometry Based on Quadrature Demodulation |
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| SU Ting,ZHANG Yong lin.Error Analysis of 3-D Profilometry Based on Quadrature Demodulation[J].Journal of Optoelectronics·laser,2002,13(9):962-965. |
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| Authors: | SU Ting ZHANG Yong lin |
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| Abstract: | The errors of three dimentioned(3 D) profilometry based on quadrature demodulation are analyzed,and the corrected results are present.We found the method had three primary errors:the error that is caused by speckle of laser interference system,the error that is caused by mixing in quadrature demodulation,and the error that is caused by the cosine fringe distortion in the structure light.We analyzed these three errors by experiment and theory.At last,we gave the corrected results. |
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| Keywords: | Three dimentioned(3 D) shape measurement Profilomerty Quadrature demodulation Error analysis |
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