| 基于退化量分布的高量程MEMS加速度计的可靠性评估 |
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| 引用本文： | 马喜宏,王威,秦立君,何程.基于退化量分布的高量程MEMS加速度计的可靠性评估[J].电子器件,2018,41(4). |
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| 作者姓名： | 马喜宏 王威 秦立君 何程 |
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| 作者单位： | 中北大学电子测试技术国家重点实验室 |
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| 基金项目： | 振动驱动MEMS压电-磁电复合微能源技术研究 |
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| 摘 要： | 高量程MEMS微加速度计主要应用于航空、航天及军工等高可靠性要求的惯导领域。为了更好进行微加速度计的可靠性寿命预测，提出一种基于退化量分布，以实验数据拟合推导出分布模型参数的变化关系从而更加准确的评估微加速度计的可靠性寿命。实验研究结论表明采用新的评估方法能够获得更准确的微加速度计可靠性预测。
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| 关 键 词： | MEMS微加速度计 可靠度评估 加速退化实验 退化量分布 可靠性 |
Reliability Evaluation of High Range MEMS Accelerometer Based on Degradation Distribution |
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| Abstract: | The high range of MEMS accelerometers are mainly used in the field of inertial navigation reliability requirements of aviation, aerospace and military high. In order to better predict the lifetime reliability Accelerometer, it proposed based on the amount of degradation profile, fitting the experimental data to derive the relationship between changes in the distribution of model parameters such that a more accurate assessment of the reliability life Accelerometer. Experimental findings show that the use of the new assessment method can obtain more accurate micro-accelerometer reliability prediction. |
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| Keywords: | high-range MEMS micro-accelerometer reliability accelerated degradation experiment degradation quantity distribution reliability evaluation |
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