压氦法和预充氦法氦质谱细检漏固定方案的设计

以“氦质谱细检漏的基本判据和最长候检时间”为基础,分析了密封电子元器件内部水汽不超过5 000 ppm的可靠贮存寿命,确定了细漏检测的严密等级THemin分级,界定和拓展了适用内腔容积并进行了分段,设计了压氦法和预充氦法的固定方案,验证了固定方案规定的最长候检时间可以满足去除吸附氦的要求.从而突破了国内外相关标准改进中难以或无法实施的技术瓶颈,为加严密封性判据改进相关标准,提供了可行的技术方案.

Fixed Scheme Design of Helium Mass Spectrometric Fine Leak Detection for Pressing Helium Method and Prefilling Helium Method

Based on the theory of ＂base criterion and maximum dwell time of fine leak test using the heli- um mass spectrometer leak detector＂, the reliable storage life with an internal water vapor content no lar- ger than 5,000 ppm is analysed, and then gives the rigour grade ＇rH~,nln. It determines and extends the available cavity volume, which is divided into different segments according the rigour grade. The fixed scheme for pressing helium method and prefilling helium method is designed, validating that the maxi- mum dwell time ruled in fixed scheme can satisfy the requirement for removing adsorbed helium. The bot- tleneck which is hardly actualized can be broken through with improved standards, which provides the available technology scheme for improving the relative standards and the rigid sealability criterion.