| 斜置式方形探针测量单晶断面电阻率分布mapping技术 |
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| 引用本文： | 张艳辉,孙以材,刘新福,陈志永.斜置式方形探针测量单晶断面电阻率分布mapping技术[J].半导体学报,2004,25(6):682-686. |
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| 作者姓名： | 张艳辉 孙以材 刘新福 陈志永 |
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| 作者单位： | 河北工业大学微电子所 天津300130
(张艳辉，孙以材，刘新福)，河北工业大学微电子所 天津300130(陈志永) |
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| 基金项目： | 国家自然科学基金
,
河北省自然科学基金
,
天津市自然科学基金 |
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| 摘 要： | 介绍了一种应用斜置式方形探针测量单晶断面电阻率的测试方法 ,将Rymaszewski直线探针测试方法引入到方形探针测试 ,并对测试过程中产生的游移以及图像监控问题进行了讨论 .应用此测试方法得到了 75mm的全片电阻率分布的mapping图 ,测试结果表明该方法可以在测量区域明显减小的同时保证测量的精确性 ,是一种行之有效的测量方法
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| 关 键 词： | 四探针技术 电阻率测量 游移 Rymaszewski测试法 |
| 文章编号： | 0253-4177(2004)06-0682-05 |
| 修稿时间： | 2003年6月2日 |
Mapping Technique for Resistivity Distribution Measurement on Cross-Section of Original Silicon Monocrystal Using Inclined-Placed Square-Probe |
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| Zhang Yanhui,Sun Yicai,Liu Xinfu and Chen Zhiyong.Mapping Technique for Resistivity Distribution Measurement on Cross-Section of Original Silicon Monocrystal Using Inclined-Placed Square-Probe[J].Chinese Journal of Semiconductors,2004,25(6):682-686. |
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| Authors: | Zhang Yanhui Sun Yicai Liu Xinfu and Chen Zhiyong |
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| Abstract: | A measuring method of the resistivity distribution for original Si mono crystal wafer using an inclined-placed square-probe is introduced and Rymaszewski linear-probe measurement is introduced into square-probe testing fields.The probe problem occurring in the testing process and how to inspect and control the positions of the probe tips by using image and graph processing are all discussed.A mapping of an original Si crystal wafer is obtained by this method.It is proved by the results that the accuracy can be ensured as the testing area is diminished obviously,and this method is an effective testing method. |
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| Keywords: | four-point probe technique resistivity measurement probe wander Rymaszewski method |
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