Investigation of the polysilicon p-i-n diode and diode string as a process compatible and portable ESD protection device

The polysilicon p-i-n diode displays noticeable process compatibility and portability in advanced technologies as an electrostatic-discharge(ESD) protection device.This paper presents the reverse breakdown,current leakage and capacitance characteristics of fabricated polysilicon p-i-n diodes.To evaluate the ESD robustness,the forward and reverse TLPⅠ-Ⅴcharacteristics were measured.The polysilicon p-i-n diode string was also investigated to further reduce capacitance and fulfill the requirements of tunable cut-in or reverse breakdown voltage. Finally,to explain the effects of the device parameters,we analyze and discuss the inherent properties of polysilicon p-i-n diodes.