| 基于MMIC工艺的片上射频LC无源滤波器 |
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| 引用本文： | 武锐,廖小平,张志强.基于MMIC工艺的片上射频LC无源滤波器[J].半导体学报,2008,29(12):2437-2442. |
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| 作者姓名： | 武锐 廖小平 张志强 |
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| 作者单位： | 东南大学MEMS教育部重点实验室，南京 210096;东南大学MEMS教育部重点实验室，南京 210096;东南大学MEMS教育部重点实验室，南京 210096 |
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| 摘 要： | 设计、制作了几种基于MMIC工艺的片上LC低通/带通滤波器并进行了测试. 测试结果表明，一个3nH的MMIC电感在6.8GHz下品质因数达到13.8，自谐振频率达到15.5GHz；制作的LC低通/带通滤波器的截止频率或中心频率与设计偏差很小，分别为2%和3.3%；低通滤波器在各自通带内的插入损耗小于3dB，带通滤波器在中心频率的插入损耗为7.2dB.
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| 关 键 词： | LC无源滤波器 电感 电容 MMIC |
| 收稿时间： | 4/14/2008 1:32:11 PM |
MMIC-Based RF On-Chip LC Passive Filters |
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| Wu Rui,Liao Xiaoping and Zhang Zhiqiang.MMIC-Based RF On-Chip LC Passive Filters[J].Chinese Journal of Semiconductors,2008,29(12):2437-2442. |
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| Authors: | Wu Rui Liao Xiaoping and Zhang Zhiqiang |
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| Affiliation: | Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China;Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China;Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China |
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| Abstract: | The design and fabrication of on-chip LC low/band-pass filters are presented,and the filters are accomplished with MMIC process.Measurement results show that the Q of a 3nH inductor is 13.8 at 6.8GHz and the self-resonant frequency is 15.5GHz.The measured cutoff/center frequencies of low/band-pass filters agree with the design,and the contrast are 2% and 3.3% respectively.The insertion loss of low-pass filters is less than 3dB,and the insertion loss of band-pass filter is 7.2dB at the center frequency. |
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| Keywords: | LC passive filter inductor capacitor MMIC |
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