| 97dB动态范围、带温度补偿的MEMS电容传感器读出电路 |
| |
| 作者姓名： | Yin Tao Zhang Chong Wu Huanming Wu Qisong Yang Haigang |
| |
| 作者单位： | Institute of Electronics, Chinese Academy of Sciences |
| |
| 摘 要： | This paper presents a charge-sensitive-amplifier(CSA)based readout circuit for capacitive microelectro-mechanical-system(MEMS)sensors.A continuous-time(CT)readout structure using the chopper technique is adopted to cancel the low frequency noise and improve the resolution of the readout circuits.An operational trans-conductance amplifier(OTA)structure with an auxiliary common-mode-feedback-OTA is proposed in the fully differential CSA to suppress the chopper modulation induced disturbance at the OTA input terminal.An analog temperature compensation method is proposed,which adjusts the chopper signal amplitude with temperature variation to compensate the temperature drift of the CSA readout sensitivity.The chip is designed and implemented in a 0.35 m CMOS process and is 2.1 2.1 mm2in area.The measurement shows that the readout circuitachieves0.9aF/√Hz capacitive resolution,97dBd ynamic range in 100Hz signal bandwidth,and 0.8mV/fF sensitivity with a temperature drift of 35 ppm/℃ after optimized compensation.
|
| 关 键 词： | capacitive readout circuit temperature compensation charge sensitive amplifier(CSA) MEMS sensor |
| 收稿时间： | 4/2/2013 12:00:00 AM |
A 97 dB dynamic range CSA-based readout circuit with analog temperature compensation for MEMS capacitive sensors |
| |
| Yin Tao,Zhang Chong,Wu Huanming,Wu Qisong,Yang Haigang.A 97 dB dynamic range CSA-based readout circuit with analog temperature compensation for MEMS capacitive sensors[J].Chinese Journal of Semiconductors,2013,34(11):115005-8. |
| |
| Authors: | Yin Tao Zhang Chong Wu Huanming Wu Qisong and Yang Haigang |
| |
| Affiliation: | Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China |
| |
| Abstract: | capacitive readout circuit temperature compensation charge sensitive amplifier （CSA） MEMS sensor |
| |
| Keywords: | capacitive readout circuit temperature compensation charge sensitive amplifier (CSA) MEMS sensor |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
|
点击此处可从《半导体学报》下载全文 |
