带重入约束的双集束型晶圆制造设备调度算法

为了有效解决集束型晶圆制造设备群加工过程中存在的重入调度问题，构建了带重入约束的双集束型晶圆制造设备调度算法.首先分析了双集束型晶圆制造设备中重入约束特征.在此基础上，建立调度问题域，并以系统加工周期最小为目标，建立调度模型.采用分解策略，将双集束型晶圆制造设备调度问题分解成单个设备调度问题，并提出了一种全新的机械手调度顺序搜索的启发式算法.最后对调度算法进行仿真实验分析，结果表明该算法是有效的.

Scheduling Algorithm for Double Cluster Tools of Wafer Fabrication System with Reentrant Constraints

To effectively solve scheduling problems of multi cluster tools of wafer fabrication system with reentrant constraints in running process， a scheduling algorithm was proposed. Firstly， the characteristics of reentrant constraints of double cluster tools were analyzed. The problem domain of double cluster tool scheduling was established and mathematical programming models were set up to minimize the system cycle time. The scheduling problems of the double cluster tools were decomposed into scheduling problems of single cluster tool using the decomposition policy. A novel enlighten algorithm of robotic sequence searching was presented. Finally， simulation experiments were carried out to evaluate the proposed algorithm. The results indicate that the proposed algorithm is valid.