| 玻璃毛细管阵列传输效率与真空差分性能研究 |
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| 引用本文： | 蒋新亭,周洪军,霍同林,郑津津,钟鹏飞.玻璃毛细管阵列传输效率与真空差分性能研究[J].中国科学技术大学学报,2009,39(12). |
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| 作者姓名： | 蒋新亭 周洪军 霍同林 郑津津 钟鹏飞 |
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| 作者单位： | 1. 中国科学技术大学国家同步辐射实验室,安徽合肥,230029
2. 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027 |
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| 基金项目： | 国家自然科学基金面上项目，中科院"百人计划";国家重点基础研究发展(973)计划，高校博士点基金 |
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| 摘 要： | 玻璃毛细管由于它的通光性和真空差分性能被越来越广泛应用于同步辐射光束线中.为了更好地了解毛细管阵列的性能,利用国家同步辐射实验室光谱辐射标准和计量光束线(U26)研究了不同长度和直径比的玻璃毛细管阵列对VUV和软X射线传输效率,并利用该站电离室部分研究了真空差分性能.给出了实验数据.直径实测为134 μm,长度分别为7 mm(L/D=52.2)和19 mm(L/D=141.8)的玻璃毛细管阵列,当光束垂直于截面入射时,其理论计算传输效率都为61%,而实验测得的值分别为44%和24%左右.当低真空端气体压强设为120 Pa时,通过玻璃毛细管阵列后,用TMP110机组抽气时,高真空端真空度为7.6×10~(-2) Pa,其真空差分能力达到1.6×10~3倍.
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| 关 键 词： | 同步辐射 毛细管阵列 传输效率 真空差分 |
Transmission efficiency and vacuum performance study of glass capillary array |
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| JIANG Xin-ting,ZHOU Hong-jun,HUO Tong-lin,ZHENG Jin-jin,ZHONG Peng-fei.Transmission efficiency and vacuum performance study of glass capillary array[J].Journal of University of Science and Technology of China,2009,39(12). |
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| Authors: | JIANG Xin-ting ZHOU Hong-jun HUO Tong-lin ZHENG Jin-jin ZHONG Peng-fei |
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| Abstract: | Transmission efficiencies of glass capillary array in different ratios of length to diameter were researched in the spectral regions of VUV and soft X-ray by use of spectral radiation standards and metrology station (U26) in NSRL, and its vacuum differential performance was also researched. The experiment data were diameter is 134 μm, the calculated transmission efficiency of the glass capillary array for two different lengths, 7 mm(L/D=52.2) and 19 mm(L/D=141.8) is the same, about 61%, while the actually measured transmission rate is about 44% and 24%, respectively. When the higher pressure side of the glass capillary array is set at 120 Pa, the pressure on the other side is 7.6×10~(-2) Pa when it is pumped with TMP-110 system, which shows the differential capacity is 1.6×10~3 times. |
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| Keywords: | synchrotron radiation capillary array transmission efficiency vacuum differential performance |
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