石英谐振器力灵敏度温度系数特性分析

力灵敏度温度系数是石英谐振器产生温漂的主要原因之一，而且这种温漂不能用差频方法消除，因此，它是影响石英谐振式力传感器测量精度的主要原因．文中给出了测量误差与力灵敏度温度系数之间的定量关系，并得到实验验证．阐述了力灵敏度温度系数的物理意义，分析确定了标定温度的方法．在一定温度范围内使用的石英晶体谐振器，既要有一定的分辨率，又要使其测量结果不受温度影响，为此提出了石英谐振器最佳取向选取原则．根据这一原则，找出了ＡＴ切型晶片用作力敏元件时的最佳施力方位角．为提高石英谐振式力传感器的测量精度提供了一个理论基础．

CHARACTERIZATION OF THE TEMPERATURE COEFFICIENT OF FORCE SENSITIVITY OF QUARTZ CRYSTAL RESONATOR

The temperature coefficient of force sensitivity is one of the prime reasons for inducing frequency drift of quartz crystal resonator. The frequency drift can not be eliminated by deferential amplifier. The temperature coefficient of force sensitivity is an important factor that influences the precision of force sensor with quartz crystal resonator. The measurement error formula shows the quantitative relationship between the measurement error and the temperature coefficient of force sensitivity. Based on the error formula, the physical signification of the temperature coefficient of force sensitivity is explained, and the method for selecting scale temperature is given. The force sensors should possess proper resolving power, and its measurement results are independent on the temperature variation. For this reason, the selecting principle of the best angles are advanced. According to the principle, the best aziumth angles of applied force for AT cut are found. This paper can provide a theoretical basis to raise the precision of force sensors with quartz crystal resonators.