| 用于液相检测的横向场激励模式压电传感器 |
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| 引用本文： | 王文炎,张超,张志甜,刘岩,冯冠平,敬刚.用于液相检测的横向场激励模式压电传感器[J].清华大学学报(自然科学版),2009(2). |
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| 作者姓名： | 王文炎 张超 张志甜 刘岩 冯冠平 敬刚 |
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| 作者单位： | 清华大学精密仪器与机械学系;深圳清华大学研究院信息与光机电研究所; |
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| 基金项目： | 国家自然科学基金资助项目(60571014) |
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| 摘 要： | 与传统基于石英晶体微天平的压电传感器相比,横向场激励模式压电传感器具有更优异的性能。该文基于微声波理论,分析了横向场激励模式压电体声波器件的声传播机理,计算了石英晶体在任意切型及横向电场方向上的压电耦合系数,并根据计算结果设计了新型的传感器结构。3种不同浓度的水溶液用于测试传感器对液体粘度、介电常数和电导率等变化的响应。结果表明,横向场激励压电传感器不仅具有较好的质量敏感效应,还对被测液体电特性参数变化具有较高的灵敏度,可用于研制复合型压电生物传感器。
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| 关 键 词： | 生物传感器 横向场激励 压电耦合系数 灵敏度 |
Lateral-field-excitation piezoelectric sensors for liquid sensing |
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| WANG Wenyan,ZHANG Chao,ZHANG Zhitian,LIU Yan,FENG Guanping,JING Gang.Lateral-field-excitation piezoelectric sensors for liquid sensing[J].Journal of Tsinghua University(Science and Technology),2009(2). |
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| Authors: | WANG Wenyan ZHANG Chao ZHANG Zhitian LIU Yan FENG Guanping JING Gang |
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| Affiliation: | 1.Department of Precision Instruments and Mechanology;Tsinghua University;Beijing 100084;China;2.Center for Information and Optomechatronics;Research Institute of Tsinghua University in Shenzhen;Shenzhen 518057;China |
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| Abstract: | Piezoelectric sensors based on lateral field excitation(LFE) offer more superior capabilities than traditional quartz crystal microbalance sensors.Micro acoustic wave theory was used to analyze the propagation mechanism of LFE bulk acoustic waves and to calculate the piezoelectric coupling factors for arbitrary cut orientations and lateral field directions in quartz.An LFE sensor was then designed and tested in three different liquid solutions to measure the sensitivities to liquid viscosity,permittivity,an... |
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