双膜片石英谐振式力传感器设计及其性能研究

将石英谐振器分别假设为正交各向异性体和各向同性体 ,利用有限元法对其进行失稳时临界力的计算和分析 ,得出了传感器结构稳定性与谐振器厚度及支撑条件的关系。在此基础上 ,对传感器结构进行了改进 ,并对单、双膜片结构传感器的各种性能进行了实验研究 ,得出如下结论 :传感器由单膜片结构改制成双膜片结构后 ,其非线性误差、滞后误差、重复性误差和蠕变误差普遍降低 ,滞后和重复性指标的提高尤为显著 ;另外 ,双膜片结构传感器的抗偏载及横向冲击能力大大增强 ,可靠性明显提高

Design of the quartz resonant force sensor with double diaphragms and study of its performer

The structural stability of the sensor correlates with the loss in stability of the resonator. Assuming that the quartz resonator is orthogonally anisotropic and isotropic, the critical force of the resonator when the instability occurrs was calculated using the finite element method. The relationship between the structural stability of the sensor, its thickness and the support design of the resonator was obtained. The stability analyses were used to design quartz resonant force sensor with double diaphragms having high stability, high precision and high reliability. The input and output, creep, stability, etc. of sensors with one diaphragm were compared experimentally with those with double diaphragms. The sensors with double diaphragms performed much better than those with one diaphragm with reduced nonlinear error, hysteresis error, repeatability error and creep error. The hysteresis and repeatability performance is improved significantly. The bias load resisting ability, the transverse impact resisting ability, and the long term reliability have also been improved.