介质表面的辉光放电特性

为产生大面积片状等离子体,实验研究了在介质表面的直流放电氩等离子体特性. 测试了共面电极和对面电极两种结构下的放电伏安特性曲线和等离子体发光图像,讨论了介质表面效应对电场分布和放电特性的影响. 结果表明,这两种电极结构具有相似的放电特征,等离子体通道紧贴介质表面;二者伏安特性曲线基本相同,它们随放电条件的变化规律也比较相似,但与传统平板电极直流放电特性不尽相同. 介质表面影响电场分布和电荷损失机制,因而影响放电特性. 介质表面共面和对面电极结构可以产生高密度平面等离子体.

Characteristics of Glow Discharge at Dielectric Surface

To obtain large-area sheet plasma, direct-current (DC) glow discharge above a diele-ctric surface in argon has been investigated experimentally. The voltage-current characteristics and images of the surface discharge were recorded under coplanar and face-to-face configurations. The effect of the dielectric on the distribution of electric field and the discharge characteristic were discussed. The results showed that the surface discharge in the vicinity of the dielectric is similar for the two configurations, with both similar plasma image and current-voltage characteristic which is dependent upon the operation conditions, but it is different from the classical DC glow discharge due to the influence of the dielectric surface on the electric field and the charge-loss mechanism. A dense sheet plasma can be achieved in both the coplanar and the face-to-face electrode geometry.