Effect of Antimony Addition on Electrical and Optical Properties of Tin Oxide Film |
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| Authors: | Kwang Ho Kim Soo Won Lee Dong Won Shin Chan Gyung Park |
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| Affiliation: | Department of Inorganic Materials Engineering, Pusan National University, Pusan 607-735, Korea; Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, Korea |
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| Abstract: | Antimony-doped tin oxide films were prepared on Corning glass substrate by chemical vapor deposition from a gas mixture of SnCl4–SbCl5–H2O. The electrical conductivity and optical transmission of tin oxide films were studied with antimony doping. The film conductivity increased largely without losing optical transparency with a small addition of antimony. The increase of the conductivity was attributed mainly to more electrons donated by pentavalent Sb ions in the SnO2 lattice. Large additions of antimony, however, diminished the conductivity, optical transparency, and crystallinity of the film. The diminution was found to be caused by fine Sb2O5 phases codeposited with SnO2. |
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