| TiO_2纳米管阵列的湿敏特性研究 |
| |
| 引用本文： | 李明辉,李伊荇,杜方,张艳艳,付乌有,杨海滨.TiO_2纳米管阵列的湿敏特性研究[J].现代仪器,2009,15(3). |
| |
| 作者姓名： | 李明辉 李伊荇 杜方 张艳艳 付乌有 杨海滨 |
| |
| 作者单位： | 吉林大学超硬材料国家重点实验室,长春,130012 |
| |
| 摘 要： | 采用电化学阳极氧化法制备高度有序的TiO_2纳米管阵列。样品分别在300℃、400℃、 500℃和600℃条件下煅烧。Ti O_2纳米管的结构和形貌由X射线衍射仪(XRD)和场发射扫描电镜(FESEM)进行表征。用TiO_2纳米管阵列设计一种新型的传感器来考察其湿敏特性。600℃条件下煅烧的样品在11 %～95%相对湿度(RH)范围内表现出比较高的灵敏度,在电阻上有两个数量级的变化,并且响应和恢复时间比较短(<190s)。
|
| 关 键 词： | 二氧化钛纳米管 阳极氧化 湿度传感器 薄膜 |
Humidity sensing properties of TiO2 nanotubes arrays |
| |
| Abstract: | The highly ordered TiO_2 nanotubes arrays are prepared by electrochemical anodic oxidation.The samples are calcined at 300℃,400℃,500 ℃ and 600 ℃ respectively.The structure and the morphology of the TiO_2 nanotubes are analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). We design a novel sensor with the TiO_2 nanotubes films to investigate the humidity sensing behaviours.The samples calcined at 600℃ show high sensitivity with nearly two orders change in the resistance and short response and recovery time (<190s) during the relative humidity variation from 11% to 95%. |
| |
| Keywords: | Titania nanotubes Anodization Humidity sensor Thin fihn |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
