| 多层薄膜结构气敏效应研究 |
| |
| 引用本文： | 谷丰,张耀华,李民强.多层薄膜结构气敏效应研究[J].传感技术学报,1991,4(2):1-7. |
| |
| 作者姓名： | 谷丰 张耀华 李民强 |
| |
| 作者单位： | 中国科学院合肥智能机械研究所
(谷丰，张耀华)，中国科学院合肥智能机械研究所(李民强) |
| |
| 摘 要： | 在SnO2气敏薄膜层上覆盖一层或多层钝化材料（SiO2,Al2O3) 薄膜，制成的多层膜气敏元件，可很好地排除大分子气体如乙醇等对小分子H2检测的干扰，使其具有单独检测H2的功能。本文还通过测量元件的升温曲线，推导出敏感体表面的氧吸附活化能；找出活化能与灵敏度、选择性的关系。根据实验现象和物性分析结果，试着探讨了元件的敏感机理。
|
| 关 键 词： | 多层薄膜结构 气敏效应 二氧化锡 氢传感器 |
Research on Multilayer Structure of Gas Sensor |
| |
| Gu Feng Zhang Yaohua Li Minqiang.Research on Multilayer Structure of Gas Sensor[J].Journal of Transduction Technology,1991,4(2):1-7. |
| |
| Authors: | Gu Feng Zhang Yaohua Li Minqiang |
| |
| Abstract: | In our work a thin film of Si02 was coated on the surface of CVD SnO2 film by RF-Sputter. This layer could work as sieve, and the multilayer gas sensor showed a high selectivity to H2 gas. Also, we studied the increasing temperature curves of sensor at different heating rate. From these, the surface oxygen adsorption activation energy was calculated. The sensor sensitivity related with the activation energy. By the aid of structure analyses, the working mechanism of thin film Sn02 sensor was discussed. |
| |
| Keywords: | gas sensor multilayer thin film structure tin oxide selectivity hydrogen transducer |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《传感技术学报》浏览原始摘要信息 |
|
点击此处可从《传感技术学报》下载全文 |
