硅微陀螺仪的建模

提出了硅微陀螺仪的集总建模方法．该方法将硅微陀螺仪划分为多个相互关联的基本单元，各基本单元的行为特征被集总到单元的节点端口上，并表征为矩阵形式．将根据物体相对运动理论，从基本单元的解析方程出发，给出了建立硅微陀螺仪基本单元模型的一般方法，并以Verilog-A为模型编码语言实现了硅微陀螺仪参数化的基本单元模型．在Cadence Spectre上进行了仿真验证，频域仿真结果与ANSYS计算结果相差在1%以内；时域仿真结果表明利用该系统级模型能够快速进行复杂机电一体仿真．

Modeling of the micro-silicon gyroscope

Lumped behavioral models for the micro-silicon gyroscope is presented. In this method. the micromachined gyroscope is partitioned into many functional components, each of which is modeled using the relative movement theory and energy method, and whose parameterized model coded in Verilog-A is realized. To validate the efficiency of the models, a system-level model for the tuning fork gyroscope composed of functional components models is designed and co-simulated with an electronic circuit in Cadence spectre. The simulation result of modal frequency of the gyroscope is accurate to within 1 % of the ANSYS analysis. The result also indicates that the transient analysis of the complicated electromechanical coupled system is accomplished quickly in this way.