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Microsystems Engineering: A Great Stride Forward in Microelectronics Technology |
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| Authors: | Mal'tsev P P |
| Affiliation: | (1) Biosensors Group, Centro Nacional de Microelectronica (IMM-CNM-CSIC), Isaac Newton, 8 28760 Tres Cantos (PTM), Madrid, Spain |
| Abstract: | The development of new-generation technological and engineering concepts by the example of  microsystems technology and microsystems engineering approaches is considered. |
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