| 声表面波NO_2传感器敏感膜研究进展 |
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| 引用本文： | 向继文,陈依民,徐成志,胡友旺.声表面波NO_2传感器敏感膜研究进展[J].传感器与微系统,2012,31(9):1-4,13. |
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| 作者姓名： | 向继文 陈依民 徐成志 胡友旺 |
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| 作者单位： | 中南大学机电工程学院,湖南长沙410083;中南大学高性能复杂制造国家重点实验室,湖南长沙410083 |
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| 基金项目： | 国家自然科学基金资助项目(91023031);中南大学2011年度中央高校基本科研业务费,青年教师助推项目(2011QNZT059);华南理工大学表面功能结构先进制造广东普通高校重点实验室开放基金重点资助项目(SFS—KF201006K) |
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| 摘 要： | 由于工业检测、环境监测、医学监测等领域的需求,高性能NO2传感器得到了广泛的研究。声表面波传感器技术的发展为研发高灵敏度、高稳定性、响应快速、小型化的NO2传感器提供了极大的潜能。总结了近30年来声表面波NO2传感器敏感膜的研究现状,并根据现有的研究和传感器的应用需求,深入探讨了声表面波NO2传感器敏感膜面临的挑战和发展趋势。
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| 关 键 词： | 声表面波 NO传感器 敏感膜 |
Research progress of sensitive film of SAW NO2 sensor |
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| XIANG Ji-wen
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CHEN Yi-min
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XU Cheng-zhi
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HU You-wang.Research progress of sensitive film of SAW NO2 sensor[J].Transducer and Microsystem Technology,2012,31(9):1-4,13. |
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| Authors: | XIANG Ji-wen CHEN Yi-min XU Cheng-zhi HU You-wang |
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| Affiliation: | 1,2(1.School of Mechanical and Electrical Engineering,Central South University,Changsha 410083,China; 2.State Key Laboratory of High Performance and Complex Manufacturing,Changsha 410083,China) |
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| Abstract: | High-performance NO2 sensors are researched based on the needs of industry detection,environment monitoring,medical monitoring,and so on.The development of surface acoustic wave(SAW) sensor technology provides a great potential for manufacturing miniaturized NO2 sensor with high sensitivity,high stability and fast response.The development of the sensitive film applied in SAW NO2 sensor in the past 30 years is summarized,the challenges and development trends of SAW NO2 sensor sensitive film are discussed according to current research and application requirements of sensor. |
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| Keywords: | surface acoustic wave(SAW) NO2 sensor sensitive film |
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