| 用二元光学方法制作的高效率衍射光栅 |
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| 引用本文： | 周进,高文琦,黄信凡,陈伯荣,陈杰,陈文萍.用二元光学方法制作的高效率衍射光栅[J].中国激光,1995,22(2):123-125. |
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| 作者姓名： | 周进 高文琦 黄信凡 陈伯荣 陈杰 陈文萍 |
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| 作者单位： | 南京大学物理系，电子部１４所 |
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| 摘 要： | 用二元光学理论讨论高衍射效率的光栅的原理及其制作方法．并用微电子工艺做出了二次量化四位相台阶的光栅，实验测得一级衍射效率为６８％。
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| 关 键 词： | 二元光学，光栅，衍射效率 |
| 收稿时间： | 1994/4/25 |
High Efficient Diffractive Grating Produced by Binary Optics |
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| Zhou Jin, Gao Wenqi,Huang Xinfan.High Efficient Diffractive Grating Produced by Binary Optics[J].Chinese Journal of Lasers,1995,22(2):123-125. |
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| Authors: | Zhou Jin Gao Wenqi Huang Xinfan |
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| Abstract: | In this paper, the fundamental principle and fabrication method for obtaining high efficiency diffractive gratings are described. Experimental result shows that the firstorder diffractive efficiency of a four-level staircase grating is 68%. |
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| Keywords: | binary optics grating diffraction efficiency |
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