阵列透镜测量仪的设计与应用分析

为了解决500mm以上大口径光束波前的实时测量问题,设计了一种波前测量系统,即透镜阵列测量仪,其最大优点是避免了现有的H-S波前传感器所面临的大口径缩束器的加工难题。介绍了该测量系统的组成结构及其测量原理,分析了测量系统在设计中的参数选择,并根据具体的系统参数讨论了测量系统的检测性能。在此基础上,利用数值模拟对1200mm口径光束进行了波前测量的仿真实验研究,分析了测量过程中系统标定对透镜阵列测量仪的作用。仿真实验表明,透镜阵列测量仪能够实现大口径光束的波前探测。

Design and application of lens-array measurement instrument

In order to solve real-time metrical problem on beam wave-front of more than ?500mm large aperture,a wave-front measurement system is proposed based on lens-array.Its obvious merit is to avoid machining problem of large aperture optical system,which is used to translate large aperture beam into small aperture beam.Configuration and work principle of this measurement system is introduced,and its system parameters are studied.Then it is measurement capability is analyzed according to a set of special system parameters.Two beams of ?1200mm aperture are simulated,and those wave-fronts are measured separately.During this dummy experiments,system scale play an important role in wave-front measurement.The results show that the lens-array measurement can accomplish wave-front measurement of large aperture beam.Finally,its characteristic is evaluated compared with existing H-S wave-front sensor.