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| 线面式电容传感器结构设计与传感特性研究 | |
| 引用本文： | 曾涛,鲁云峰,张钟华,陈乐,许素安.线面式电容传感器结构设计与传感特性研究[J].计量学报,2019,40(6):941-945. |
| 作者姓名： | 曾涛 鲁云峰 张钟华 陈乐 许素安 |
| 作者单位： | 中国计量大学机电工程学院,浙江杭州,310018;中国计量科学研究院,北京100029;国家市场监督管理总局电学量子基准重点实验室,北京100029 |
| 摘 要： | 提出了一种基于自阻尼垂向测量参考的线面式电容传感器,对垂向运动中的残留水平位移进行精确测量。线面式电容传感器利用细丝电极作为直接垂向测量参考,消除了间接参考在其转换过程包含的系统误差;同时采用细丝末端的液体阻尼器保证细丝电极的稳定性。实验表明:在0.38~0.4pF范围内,线面式电容传感器的分辨力优于0.05μm,短期稳定性约为0.1μm。 |
| 关 键 词： | 计量学 线面式电容传感器 传感特性 运动方向检测 垂向参考 |
| 收稿时间： | 2018-09-17 |
Research in the structure design and sensing characteristics of the filament-surface capacitive sensor |
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| ZENG Tao,LU Yun-feng,ZHANG Zhong-hua,CHEN Le,XU Su-an.Research in the structure design and sensing characteristics of the filament-surface capacitive sensor[J].Acta Metrologica Sinica,2019,40(6):941-945. | |
| Authors: | ZENG Tao LU Yun-feng ZHANG Zhong-hua CHEN Le XU Su-an |
| Affiliation: | 1. College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China 2. National Institute of Metrology, Beijing 100029, China 3. The Key Laboratory for the Electrical Quantum Standard of State Administration for Market Regulation, Beijing 100029, China |
| Abstract: | A filament-surface capacitive sensor based on self-damping vertical reference to measure the residual horizontal displacement precisely during the vertical movement is presented. The filament electrode works as a direct vertical reference, which avoids the system error caused by indirect-reference conversion. And the liquid damper in the end of the filament electrode ensures the stability of the capacitive sensor. Experiments show that in the range of 0.38~0.4pF, the resolution of the filament-surface capacitive sensor is better than 0.05μm, and the short-term stability is approximately 0.1μm. |
| Keywords: | metrology filament-surface capacitive sensor sensing characteristics measurement for the movement direction vertical direction reference |
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