| 多晶硅尾气处理与净化工艺研究进展 |
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| 引用本文： | 马晔风,周俊波.多晶硅尾气处理与净化工艺研究进展[J].氯碱工业,2010,46(9):1-4. |
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| 作者姓名： | 马晔风 周俊波 |
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| 作者单位： | 北京化工大学机电工程学院,北京,100029 |
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| 基金项目： | 北京市大学生科技创新课题基金支持项目 |
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| 摘 要： | 综述国内外多晶硅的生产工艺及尾气处理方法的研究进展,探讨生产多晶硅的常用6种工艺及其优缺点,重点阐述多晶硅尾气的分离回收技术、从开路控制到闭路控制的发展过程及闭路循环技术的优点。
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| 关 键 词： | 多晶硅 尾气回收 分离方法 |
Development on study of treatment and purification technology of polycrystalline silicon tail gas |
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| MA Yefeng,ZHOU Junbo.Development on study of treatment and purification technology of polycrystalline silicon tail gas[J].Chlor-Alkali Industry,2010,46(9):1-4. |
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| Authors: | MA Yefeng ZHOU Junbo |
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| Affiliation: | ( Electromechanical College, Beijing University of Chemical Technology, Beijing 100029, China) |
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| Abstract: | The development on study of polycrystalline silicon production technology and the treatment methods of its tail gas are reviewed. Six kinds of common production process of polyerystalline silicon and their advantages and disadvantages are discussed. The recovery technology of the tail gases from polycrys- talline,silicon production and the improvement process from open-circuit control to close-circuit control are related emphatically as well as the advantages of close-circuit circulation technology. |
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| Keywords: | polycrystalline silicon tail gas recovery separating method |
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