| 基于石墨烯的NO2和NH3气体传感器研究进展 |
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| 引用本文： | 张适然,唐蒙,邓丽城,王德波.基于石墨烯的NO2和NH3气体传感器研究进展[J].微电子学,2022,52(5):862-867. |
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| 作者姓名： | 张适然 唐蒙 邓丽城 王德波 |
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| 作者单位： | 南京邮电大学 自动化学院, 南京 210023;南京邮电大学 集成电路科学与工程学院, 南京 210023 |
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| 基金项目： | 国家自然科学青年基金资助项目(61904089)；江苏省自然科学青年基金资助项目(BK20190731)； 中国博士后科学基金资助项目(2017M621692)；江苏省博士后基金资助项目(1701131B) |
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| 摘 要： | 室温下石墨烯具有较大的分子吸附比表面积、低噪声、高载流子迁移率等优异电学性能,是一种性能极佳的传感材料。与传统无机氧化物气体传感器相比,石墨烯气体传感器具有工作温度低、能耗小、恢复性高的优点。文章对两种石墨烯气体传感器的研究进展进行了综述。首先根据气体选择性不同,研究了NO2和NH3两种石墨烯气体传感器。然后对它们的灵敏度、气体响应灵敏度、响应时间等特性进行了分析对比。该项分析研究工作对气体传感器的实际应用与推广具有一定参考价值。
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| 关 键 词： | 石墨烯 气体传感器 吸附能 响应时间 DFT |
| 收稿时间： | 2021/8/11 0:00:00 |
Research Progress of NO2 and NH3 Gas Sensors Based on Graphene |
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| ZHANG Shiran,TANG Meng,DENG Licheng,WANG Debo.Research Progress of NO2 and NH3 Gas Sensors Based on Graphene[J].Microelectronics,2022,52(5):862-867. |
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| Authors: | ZHANG Shiran TANG Meng DENG Licheng WANG Debo |
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| Affiliation: | College of Automation, Nanjing Univ.of Posts and Telecommun., Nanjing 210023, P.R.China;College of Integr.Circ.Sci.and Engineer., Nanjing Univ.of Posts and Telecommun., Nanjing 210023, P.R.China |
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| Abstract: | At room temperature, graphene has excellent electrical properties such as large molecular adsorption specific surface area, low noise and high carrier mobility. Compared with traditional inorganic oxide gas sensors, graphene gas sensors have the advantages of low operating temperature, low energy consumption and high recovery. This paper reviewed the research progress of two graphene gas sensors. Firstly, NO2 and NH3 graphene gas sensors were studied according to different gas selectivity. Then their sensitivity, gas response sensitivity and response time were analyzed and compared. This analysis and research work has certain reference value for the practical application and popularization of gas sensor. |
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| Keywords: | graphene gas sensor adsorption energy response time DFT |
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