感应等离子纳米钽粉制备技术研究

为了实现对感应等离子技术制备电容器级钽粉粒度、形貌的控制，进行了改变等离子工艺参数的粉体制备工艺试验，试验中考察等离子功率、送粉速率对制备粉体的粒度、粒度分布及其形貌的影响。试验结果表明：在一定等离子体功率下，随着送粉速率的增加，粉体平均粒径增加，比表面积下降；在一定送粉速率下，随着等离子体功率的增加，粉体平均粒径减小，比表面积增加。感应等离子工艺参数的变化可以改变制备粉体性能。

Research on the Preparation Technology of Nano Ta Powder Using Induction Plasma

In order to control the particle size and morphology of capacitor grade Ta powder using plasma technology,the preparation experiments were performed by changing two main processing parameters to investigate influences of plasma power and feedrate on particle size,particle size distribution and morphology of the powder.The experimented results show that mean particle size of the powder increases and specific surface area decreases with the increase of feedrate at a certain plasma power;mean particle size dec...