一种硅微压阻式压力传感器的研究

研究了一种量程为20kPa的压阻式微压力传感器,同时采用ANSYS仿真得出影响传感器性能的一些规律。应用小挠度理论设计计算了压阻式硅传感器方形弹性膜片结构,并对圆形膜片与方形膜片进行了比较,同时设计了硅芯片以及压敏电阻的尺寸和阻值。通过模型分析和对方型硅膜片的模拟计算,确定了压敏电阻最佳放置位置,来提高灵敏度;并在各个不同的压力下仿真出应力分布图、得出输入—输出关系图及应力峰值。研究为压阻式微压力传感器的结构以及优化、稳健设计提供了一定参考。

Research on a micro piezoresistive pressure sensor

The pressure sensor of micro piezosistive with 20kPa full scale span is analyzed,and simulation by ANSYS is done to obtain the law of impacting performance of the sensor.Then the square elastic diagram of the piezosistive silicon sensor is designed and calculated by theory of little deflection and shall be compared with circular diagram.At the same time the size and resistance of silicon chip and piezoresistor is designed.Through model analyzing and simulated computing square silicon diagram the optimum location of the piezoresistor is determined to improve the sensitivity.Furthermore,the stress distribution is simulated for different pressure to obtain relation scheme between input and output value and peak stress.This study provides a reference for design and optimization of the micro pressure sensor.